Tool List

From UCSB Nanofab Wiki
Revision as of 06:01, 13 April 2018 by John d (talk | contribs) (Wet Processing: link to Chemical List page)
Jump to: navigation, search

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Vacuum Deposition

Dry Etch

Wet Processing

The Chemical List page lists available chemicals such as Developers, Acids, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization