Difference between revisions of "Tool List"

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m (corrected photo chemicals link, moved inside table for easier location)
(Reactive Ion Etching (RIE))
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*[[Ashers (Technics PEII)]]
 
*[[Ashers (Technics PEII)]]
 
*[[Plasma Clean (Gasonics 2000)]]
 
*[[Plasma Clean (Gasonics 2000)]]
  +
*[[Plamsa Clean (YES EcoClean)]]
 
*[[Plasma Activation (EVG 810)]]
 
*[[Plasma Activation (EVG 810)]]
*[[CAIBE (Oxford Ion Mill)]]
+
*[[CAIBE (Oxford Ion Mill)]]
   
 
===== Etch Monitoring =====
 
===== Etch Monitoring =====

Revision as of 19:59, 16 September 2019

Lithography

Photoresists and Lithography Chemicals
Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools