Difference between revisions of "Tool List"

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(Thermal Processing for Photolithography: link to new Ovens Overview page)
(Thermal Processing: linked to new Ovens Overview page, reorganized ovens under this, removed Strip Annealer link (removed from lab))
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* [[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor "RTA" (AET RX6)]]
 
* [[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor "RTA" (AET RX6)]]
 
* [[Rapid Thermal Processor (SSI Solaris 150)]]
 
* [[Rapid Thermal Processor (SSI Solaris 150)]]
* [[Strip Annealer]]
 
* [[High Temp Oven (Blue M)]]
 
 
* [[Tube Furnace (Tystar 8300)]]
 
* [[Tube Furnace (Tystar 8300)]]
 
* [[Tube Furnace Wafer Bonding (Thermco)]]
 
* [[Tube Furnace Wafer Bonding (Thermco)]]
 
* [[Tube Furnace AlGaAs Oxidation (Lindberg)]]
 
* [[Tube Furnace AlGaAs Oxidation (Lindberg)]]
| width="400" |
 
* [[Ovens 1, 2 & 3 (Labline)]]
 
* [[Oven 4 (Fisher)]]
 
* [[Oven 5 (Labline)]]
 
* [[Vacuum Oven (YES)]]
 
 
* [[Wafer Bonder (SUSS SB6-8E)]]
 
* [[Wafer Bonder (SUSS SB6-8E)]]
 
* [[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]
 
* [[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]
  +
| width="400" |
  +
* [[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]
  +
** [[Ovens 1, 2 & 3 (Labline)]]
  +
** [[Oven 4 (Thermo-Fisher HeraTherm)]]
  +
** [[Oven 5 (Labline)]]
  +
** [[Vacuum Oven (YES)]]
  +
** [[High Temp Oven (Blue M)]]
 
|-
 
|-
 
|}
 
|}

Revision as of 10:04, 4 June 2019

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools