Difference between revisions of "Tool List"

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m (Thermal Processing: corrected linberg --> lindberg over)
m (Optical/Electron Microscopy: moved SEMs to bottom)
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===== Optical/Electron Microscopy =====
 
===== Optical/Electron Microscopy =====
* [[Field Emission SEM 1 (FEI Sirion)]]
 
* [[Field Emission SEM 2 (JEOL 7600F)]]
 
* [[SEM Sample Coater (Hummer)]]
 
 
* [[Microscopes|Optical Microscopes]]
 
* [[Microscopes|Optical Microscopes]]
 
* [[Fluorescence Microscope (Olympus MX51)]]
 
* [[Fluorescence Microscope (Olympus MX51)]]
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* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Photo-emission & IR Microscope (QFI)|Photo-emission & Thermal IR Microscope (QFI)]]
 
* [[Photo-emission & IR Microscope (QFI)|Photo-emission & Thermal IR Microscope (QFI)]]
  +
* [[Field Emission SEM 1 (FEI Sirion)]]
  +
* [[Field Emission SEM 2 (JEOL 7600F)]]
  +
* [[SEM Sample Coater (Hummer)]]
   
 
===== Topographical Metrology =====
 
===== Topographical Metrology =====

Revision as of 13:01, 30 May 2019

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools