Difference between revisions of "Tool List"

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m (Inspection, Test and Characterization: QFI added "thermal")
(Thermal Processing: link to RTP Solaris 150)
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* [[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor "RTA" (AET RX6)]]
 
* [[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor "RTA" (AET RX6)]]
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* [[Rapid Thermal Processor (SSI Solaris 150)]]
 
* [[Strip Annealer]]
 
* [[Strip Annealer]]
 
* [[High Temp Oven (Blue M)]]
 
* [[High Temp Oven (Blue M)]]

Revision as of 11:05, 28 May 2019

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools