Difference between revisions of "Tool List"

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m (Topographical Metrology: Profilm3D new URL)
m (Inspection, Test and Characterization: QFI added "thermal")
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* [[Deep UV Optical Microscope (Olympus)]]
 
* [[Deep UV Optical Microscope (Olympus)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
* [[Photo-emission & IR Microscope (QFI)]]
+
* [[Photo-emission & IR Microscope (QFI)|Photo-emission & Thermal IR Microscope (QFI)]]
   
 
===== Topographical Metrology =====
 
===== Topographical Metrology =====

Revision as of 18:00, 21 March 2019

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools