Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to: navigation, search
(Inspection, Test and Characterization: link for Filmetrics profilm3D)
m (Topographical Metrology: Profilm3D new URL)
Line 160: Line 160:
 
** ''Sub-micron Particle Counter''
 
** ''Sub-micron Particle Counter''
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
* [[White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D)]]
+
* [[Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D)]]
 
| width="400" |
 
| width="400" |
 
===== Thin-Film Analysis/Measurement =====
 
===== Thin-Film Analysis/Measurement =====

Revision as of 10:37, 6 February 2019

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools