Difference between revisions of "Tool List"

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(Topographical Metrology)
(Thin-Film Analysis/Measurement: Add links to Filmetrics F10RT-UVX & F50)
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* [[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]
 
* [[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]
 
* [[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]
 
* [[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]
  +
* [[Optical Film Thickness & Wafer-Mapping (Filmetrics F50)]]
  +
* [[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Reflection/Transmission Spectra & Optical Film Thickness (Filmetrics F10-RT-UVX)]]
 
* [[Optical Film Thickness (Nanometric)]]
 
* [[Optical Film Thickness (Nanometric)]]
 
* [[Resistivity Mapper (CDE RESMAP)]]
 
* [[Resistivity Mapper (CDE RESMAP)]]

Revision as of 21:42, 6 December 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools