Difference between revisions of "Tool List"

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(Updated AFM to latest model)
m (Reverted edits by Mitchell (talk) to last revision by John d)
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* [[Step Profilometer (KLA Tencor P-7)]]
 
* [[Step Profilometer (KLA Tencor P-7)]]
 
* [[Step Profilometer (Dektak 6M)]]
 
* [[Step Profilometer (Dektak 6M)]]
* [[Atomic Force Microsope (Bruker ICON)|Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
+
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]
 
** ''Sub-micron Particle Counter''
 
** ''Sub-micron Particle Counter''

Revision as of 11:40, 29 November 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools