Difference between revisions of "Tool List"

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(Topographical Metrology: link to new KLA profiler)
(Topographical Metrology: removed Rudolph Ellips & old Dektak)
Line 149: Line 149:
   
 
===== Topographical Metrology =====
 
===== Topographical Metrology =====
* [[Step Profile (Dektak IIA)]]
 
* [[Step Profilometer (Dektak 6M)]]
 
 
* [[Step Profilometer (KLA Tencor P-7)]]
 
* [[Step Profilometer (KLA Tencor P-7)]]
  +
* [[Step Profilometer (Dektak 6M)]]
 
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
 
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]
Line 159: Line 158:
 
===== Thin-Film Analysis/Measurement =====
 
===== Thin-Film Analysis/Measurement =====
 
* [[Ellipsometer (Woollam)]]
 
* [[Ellipsometer (Woollam)]]
* [[Ellipsometer (Rudolph)]]
 
 
* [[Film Stress (Tencor Flexus)]]
 
* [[Film Stress (Tencor Flexus)]]
 
* [[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]
 
* [[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]

Revision as of 22:16, 10 October 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools