Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to: navigation, search
(ICP-RIE: link to SLR Fluorine Etcher)
(Topographical Metrology: link to new KLA profiler)
Line 151: Line 151:
 
* [[Step Profile (Dektak IIA)]]
 
* [[Step Profile (Dektak IIA)]]
 
* [[Step Profilometer (Dektak 6M)]]
 
* [[Step Profilometer (Dektak 6M)]]
  +
* [[Step Profilometer (KLA Tencor P-7)]]
 
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
 
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]

Revision as of 16:30, 10 October 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools