Difference between revisions of "Tool List"

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m (Thermal Processing: fix table)
(Inspection, Test and Characterization: link to Filmetrics F-40-UV page)
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* [[Ellipsometer (Rudolph)]]
 
* [[Ellipsometer (Rudolph)]]
 
* [[Film Stress (Tencor Flexus)]]
 
* [[Film Stress (Tencor Flexus)]]
* Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)
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* [[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]
 
* [[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]
 
* [[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]
 
* [[Optical Film Thickness (Nanometric)]]
 
* [[Optical Film Thickness (Nanometric)]]

Revision as of 16:48, 17 July 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools