Difference between revisions of "Tool List"

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(Vacuum Deposition: Updated Sputter 5 link)
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*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 4 (CHA)]]
 
*[[E-Beam 4 (CHA)]]
*[[Removed]]
 
 
*[[Sputter 3 (AJA ATC 2000-F)]]
 
*[[Sputter 3 (AJA ATC 2000-F)]]
 
*[[Sputter 4 (AJA ATC 2200-V)]]
 
*[[Sputter 4 (AJA ATC 2200-V)]]
*[[Sputter 5 (Lesker AXXIS)]]
+
*[[Sputter 5 (AJA ATC 2200-V)]]
   
 
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Revision as of 13:08, 1 May 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Vacuum Deposition

Dry Etch

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization