Difference between revisions of "Tool List"

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(Vacuum Deposition)
(Vacuum Deposition)
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*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 4 (CHA)]]
 
*[[E-Beam 4 (CHA)]]
*[[Blank]]
+
*[[Removed]]
 
*[[Sputter 3 (AJA ATC 2000-F)]]
 
*[[Sputter 3 (AJA ATC 2000-F)]]
 
*[[Sputter 4 (AJA ATC 2200-V)]]
 
*[[Sputter 4 (AJA ATC 2200-V)]]

Revision as of 08:16, 3 April 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization