Difference between revisions of "Tool List"

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(Lithography: link to available PRs)
(Vacuum Deposition)
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*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 4 (CHA)]]
 
*[[E-Beam 4 (CHA)]]
  +
*[[Blank]]
*[[Sputter 2 (SFI Endeavor)]]
 
 
*[[Sputter 3 (AJA ATC 2000-F)]]
 
*[[Sputter 3 (AJA ATC 2000-F)]]
 
*[[Sputter 4 (AJA ATC 2200-V)]]
 
*[[Sputter 4 (AJA ATC 2200-V)]]

Revision as of 15:58, 2 April 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization