Difference between revisions of "Tool List"

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You can see our available photoresists on the [https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Chemical_Datasheets Chemical Datasheets page].
 
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Revision as of 12:59, 16 March 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization