Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to: navigation, search
(Thermal Processing: added ovens from "lithography" section)
(Dry Etch)
Line 58: Line 58:
 
*[[RIE 5 (PlasmaTherm)]]
 
*[[RIE 5 (PlasmaTherm)]]
 
*[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]
 
*[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]
  +
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]]
 
*[[Ashers (Technics PEII)]]
 
*[[Ashers (Technics PEII)]]
 
*[[UV Ozone Reactor]]
 
*[[UV Ozone Reactor]]

Revision as of 09:34, 6 November 2017

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization