Difference between revisions of "Tool List"

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(Lithography)
(Thermal Processing: added ovens from "lithography" section)
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* [[Tube Furnace AlGaAs Oxidation (Linberg)]]
 
* [[Tube Furnace AlGaAs Oxidation (Linberg)]]
 
* [[Wafer Bonder (SUSS SB6-8E)]]
 
* [[Wafer Bonder (SUSS SB6-8E)]]
  +
* [[Ovens 1, 2 & 3 (Labline)]]
  +
* [[Oven 4 (Fisher)]]
  +
* [[Oven 5 (Labline)]]
  +
* [[High Temp Oven (Blue M)]]
  +
* [[Vacuum Oven (YES)]]
   
 
=Packaging=
 
=Packaging=

Revision as of 18:54, 8 September 2017

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization