Step Profilometer (KLA Tencor P-7)

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Step Profilometer (KLA Tencor P-7)
KLA-Tencor-P7 Photo.JPG
Tool Type Inspection, Test and Characterization
Location Bay 4
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Surface Profilometer
Manufacturer KLA Tencor


About

The KLA Tencor info will be here

Detailed Specifications

  • Probe Tip has a 2um radius and a 60 degree angle
  • Maximum wafer size: ____
  • 1D Profile and 2D Raster Scanning
  • Lateral Resolution: _____
  • Height Resolution: _____

Instructions