Rapid Thermal Processor (SSI Solaris 150)

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Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Rapid Thermal Processor (SSI Solaris 150)
Tool Type Thermal Processing
Location Bay 5
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Rapid Thermal Annealing (RTA)
Manufacturer SSI
Model Solaris 150
Thermal Processing Recipes
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About

To Do: insert basic info

Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions