SEM Sample Coater (Hummer)

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SEM Sample Coater (Hummer)
SEMSample.jpg
Tool Type Inspection, Test and Characterization
Location Bay 1
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description
Manufacturer Hummer


About

This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.