RIE5 - Standard Operating procedure (Cortex Software)

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Running a process on RIE #5

  1. Log in by clicking the User Login button on the upper right hand side of the screen. Login with your group user name and password.
  2. Choose the Process Menu located on bottom left corner of the screen. It's the one with the stop watch icon.
  3. Choose the Start Job screen on the bottom left of the screen. 
  4. Choose a recipe to run from the Recipe menu list.
  5. Vent the Load Lock by choosing the Vent Lock button on the left side of the screen.
  6. Put your wafer with the major flat toward the back of the pocket on the transfer arm.
  7. Pump the Load Lock with the Pump Lock button on the left.
  8. Choose a recipe to run from the list of available recipes.
    1. If the recipe has two arrows next to it it will automatically pump the lock, then load into the right chamber, then Run the recipe and then unload into the lock and vent.
    2. If the recipe does not have the two arrows you will need to Load wafer into the process chamber with the Service-Handler screen. See the "Material Transfer" section below.
  9. Choose Start Job on the top left of the screen. 
  10. You can stop a job by choosing the Next Step button on the left side of the screen. It will go to the next step after the loop.
  11. You can end a process abruptly by choosing the the Abort Button on the left side of the screen.  

Material Transfer for RIE #5

Load wafer into etching chamber

  1. To transfer a wafer manually choose the Service Icon on the bottom of the screen. It's the one with the two gears.
  2. Choose the Handler button.
  3. Click the Vent Lock  button from the left side of the screen.
  4. Put your wafer on the transfer arm.
  5. Choose Pump Lock button on left of the screen.
  6. Choose the Transfer button once available. Wafer will transfer into the process chamber.

Unload a wafer from etching chamber

  1. choose the Service Icon on the bottom of the screen. It's the one with the two gears.
  2. Choose the Handler button.
  3. Click the Transfer button. Wafer will transfer out.
  4. Vent Lock with Vent Lock button on left side of the screen.
  5. Remove wafer and press Pump Lock.