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UCSB NanoFab Announcements

New Filmetrics Systems

A Filmetrics F10-RT for optical reflection/transmission spectra, and a Filmetrics F50 thin-film wafer-mapping system have been installed. Trainings will be announced once operating procedures have been developed. Contact Ning Cao for more info. A Filmetrics Profilm-3D optical profilometer is also installed and procedures being developed by Tony Bosch. // John d 15:21, 12 December 2018 (PST)

How to use this wiki

  • The Nanofab Wiki consists of resources to help our users work better. Here you can find MSDS sheets, information on all the tools in the lab and contact information for all our staff.
  • This wiki site has extensive safety related information on common hazards and work practices and procedures within the facility. All facility users should be familiar with the information as relates to their work.
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  • Users are encouraged to add well qualified process data to the Wiki Processes pages. The Wiki becomes more useful as more in house processes are developed and included in this database.
  • We also welcome device process flow sheets from dissertations for any device types made in the facility.

  • Since there are multiple users of the facility, with their own unique projects, the management of the facility cannot be responsible for overseeing all aspects of their work. Therefore, the supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans."


News & Announcements

News from the U.C. Santa Barbara Nanofabrication Facility.

Filmetrics Optical Profilometer

A new Filmetrics Profilm3D optical profilometer will be installed in the next month. The system complements the LEXT Confocal Microscope, by providing large-area profiles (~5-10mm square) with nanometer-level height resolution. // John d 10:59, 14 December 2018 (PST)

Filmetrics Optical Measurement Systems

A Filmetrics F10-RT for optical reflection/transmission spectra, and a Filmetrics F50 thin-film wafer-mapping system have been installed. Contact Ning Cao for more info. // John d 15:24, 12 December 2018 (PST)

KLA Tencor Profilometer Installed

We have purchased a new KLA Tencor Stylus Profilometer, that has been installed in Bay 4. // John d 17:28, 12 September 2018 (PDT)

Laser Endpoint Monitors

We've installed new Intellemetrics LEP500 Laser Endpoint Detection monitoring on the DSEiii & ICP#2 & ICP#1 etchers. This allows you to terminate your etch at a calibrated/modeled distance into a layer, and removes the need to calibrate etch rates for most processes. // John d 09:26, 17 July 2018 (PDT)

Metal Processes on the Atomic Layer Deposition

We now have Ruthenium (Ru) and Platinum (Pt) metal depositions developed on the Oxford FlexAL ALD tool. See the Atomic Layer Deposition: Recipes page or contact Bill Mitchell for more information. // Posted: 16:07, 01 June 2017 (PST)

New Deep Silicon Etcher Online

A new Plasma-Therm Versaline DSE III DRIE etcher has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. An Intellemetrics LEP500 laser end point monitor has also been installed on the system. // Posted: 22:16, 27 November 2017 (PST)

2016 Survey Results

See the May 2016 User Survey Results. // Posted: 12:00, 01 May 2016 (PST)

CAIBE Ion Mill Available

The CAIBE (Oxford Ion Mill) is up and running! Contact Brian Lingg for more information. // Posted: 12:00, 01 July 2015 (PST)

NanoFiles SFTP Online

Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check SignupMonkey for details. // Posted: 12:00, 07 July 2013 (PST)

For any questions, comments or concerns regarding the wiki, please contact the Wiki Admin.