Calculators + Utilities
This page lists a few online calculators and utilities that are useful to lab users.
Fabrication Processes & Converters
- Thermal Oxide Calculator (BYU)
- Thermal Oxide Calculator (Leland Stanford Jr.)
- This Thermal Ox calculator allows you to tweak the calculation using the Partial Pressure variable, to match your experimental data.
- Conversion of Pressure Units (calculatoredge.com)
- Mean Free Path tables (Pfeiffer Vacuum)
- LelandStanfordJunior.com: Film Stress, Ion Implant, Thermal Oxidation, KOH Etching & online curve-fitting
- WebElements: Compounds
- Boiling points of various compounds can tell you how volatile an etch product may be in a reactive ion etch, or whether they need to be wet-etched instead.
- Physical Properties of Semiconductors (Ioffe Institute)
- Transene Inc. Chemical Compatibility Chart
- This table shows common metals and which Transene etchants they are attacked by/impervious to.
- A.R. Clawson, "Guide to references on III±V semiconductor chemical etching", 2001
- Enormous review of published wet etches of many semiconductors and alloys. The only thing it's missing is a hyperlinked table of contents.
Optical constants of many common materials. Useful for laser etch monitoring, optical filter/mirror/anti-reflection coating design, photonic devices etc.
Scripts + Programs
- FIJI - scientific image anaylsis software
- Gwyddion - free analysis software for Atomic Force Microscopes (AFMs) and other 3D data.
- Sophisticated leveling, slicing, roughness/particulate analysis functions etc.
- Can open Bruker NanoScope files, from the AFM
- ProfilmOnline.com (Filmetrics) - online analysis/storage/sharing of 3D topographical data and images.
CAD Layout Programs
Use these for designing your lithography mask plates.
- L-Edit - Powerful multi-layer layout program. Sophisticated object instantiation and array layout, to reduce files sizes and easily push changes to multiple cells.
- The NanoFab will provide a network license for academic users.
- Windows only.
- Log into the NanoFiles SFTP server, and download L-Edit & Install instructions from the
- See this L-Edit Tutorial for a good starter guide. Written by Cherry Gupta, courtesy of Prof. Sumita Pennathur.
- KLayout - A free, open-source, and fast/simple CAD tool for mask/reticle layout.
- Available on Windows, Mac or *Nix.
- Easily scriptable with Python or Ruby, with decent tutorials.
- Fast and very effective viewing of layer overlay, overlay multiple files, cell hierarchy etc.
- The only confusing part about KLayout is how to draw circles. You have to draw a square, and then apply the Edit>Selection>Round Corners function - this is because GDS files do not have a "circle" primitive built-in. Make sure you include enough polygon points, eg. 200.
- ‘Before’ starting your design, set the Layout Properties > Database Unit to something small eg. 0.0001 µm (0.1nm)
- Anaconda Python
- A free Matlab-like IDE and GUI, using the Python language. The Spyder interface is modeled after Matlab.
- Includes the scientific Python libraries needed for array math (numpy), plotting (matplotlib), data science (pandas) and many others. Many open-source packages are available to extend capabilities. The PyVisa module adds equipment control capabilities for automated measurements.
- Octave Online Interpreter (online-utility.org)
- A Matlab-like command-line interface, powered by Python Octave.
- Wolfram Alpha
- A versatile online interpreter/calculator, allowing calculations such as "Volume of 1.5g of Silicon", "melting point of SiO2" or "520°C in Fahrenheit".
- Keithley I-V Sweep
- Sweep voltage and plot current vs. voltage using a Keithley SMU.
- Already installed at the Probe Station in Bay 4, and on the QFI Thermal Microscope (Use Python(X,Y) to run).
- Requires the pyvisa python module.
- QFIScope Thermal Analysis
- Import 2D temperature data from the IR Thermal Microscope (QFI) and plot temperature profiles at user-specified locations.
- Already installed on the QFI Infrared Microscope.
- Laser Etch Monitor Simulation in Python
- Simulate your laser endpoint signal as you dry-etch through a stack of thin-film layers, using an open-source electromagnetics module.
- nk.py (Demis D. John)
- Python functions for returning n (ref. idx.) & k (ext. coeff.) of various NanoFab thin-films at a specified wavelength (aka. dispersion models).