Hitachi Scanning Electron Microscope / S 2400

Equipment Description:
Hitachi Scanning Electron Microscope (SEM) / S 2400

Manufacturer:
Hitachi Instruments, Inc.
3100 N. First St.
San Jose, CA 95134
Phone: (408) 432-0520
Fax: (408) 432-0704

 

 

 

 

General Information and Usage:

This is a general purpose, 25 kV, diffusion-pumped, tungsten filament-based SEM; it is easy to use and readily accessible. Maximum magnification is 300,000x. Samples, which are usually 'piece parts' less than 2 cm on a side, are generally mounted on a specimen stub with conductive paste or metal clip. Larger pieces such as partial or whole 2-4" wafers my be loaded with user-supplied holders. The specimen stage is non-eusentric (ie. focal point change with stage adjustments), and requires that the chamber be brought to atmosphere for loading / unloading, ie. there is no loadlock. After sample loading and evacuation, high voltage, typically 4-25 kV, can be applied. Focusing can be done manually or with an automatic 'AUTO' mode which is usable up to 1000x. Standard TV and raster scans, reduced area scanning for focus / stigmation and video signal monitoring are available. Console video brightness / contrast can be done automatically with an ABC (AUTO BRIGHTNESS CONTRAST CONTROL) or manually; stigmation is done similarly. Minimum magnification is limited by the sample-to-objective lense working distance (WD): 400x for TV mode @ 6 mm WD and 40x for TV mode @ 34 mm WD. Images may be 'photographed' with either a Sony digitizer with printer or standard Polaroid camera using type 52 film (4" x 5"). The film plane can be split in half to make it possible to photograph two different images in the left and right half of the photograph; stereo images can be produced this way.

 

Equipment Specifications:

  • Resolution: 10.0 nm
  • Magnification: 20x (WD = 35 mm) - 300,000x
  • Accelerating voltage: 0.3-3 (0.1 kV steps), 4-8 (1 kV steps), 10, 12, 15, 18, 20, 22, 25 kV
  • Electronic FOV movement: ±20 microns (WD = 30 mm)
  • Specimen Stage Specifications:
    • Range of Movement X: 0 - 80 mm
    • Range of Movement Y: 0 - 40 mm
    • Range of Movement T: -20 - 90 degrees
    • Range of Movement R: 360 degrees continuous
    • Range of Movement Z: 5 - 35 mm
  • Maximum specimen size: 150 mm
  • Specimen stubs: 15 mm, 60 mm, 125 mm diameter
  • (Note: The range of tolerable movement for the stage is dependent on such factors as the WD, specimen slant angle and stub size)

 

Special Notes / Additional Comments:

  • The unit has a S-5109 Raster Rotation / Dynamic Focus unit which is used with the CRT video image only in the raster scan mode

 

Contact Information:

For additional information regarding the Hitachi Scanning Electron Microscope / S 2400 or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it. using the telephone number or e-mail address below.

This email address is being protected from spambots. You need JavaScript enabled to view it.
Phone: (805) 893-8174
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