FEI Field Emission SEM / Sirion

Equipment Description:
FEI Thermal Field Emission SEM
Sirion with EDAX Falcon EDX system

FEI Comapny
Global Headquarters
5350 NE Dawson Creek Drive,
Hillsboro, Oregon 97124
USA Tel: 503-726-7500
Fax: 503-726-7509



Control System:

  • The microscope is controlled completely by a mouse; optional knob box included
  • Control software is run under MS-Windows Graphic User Interface and allow concentration on the specimen rather than microscope controls
  • Computer-assisted alignment of the software throughout the range of spotsize and high voltage is present



  • Thermal Field Emission Source
  • Resolution of 1.5 nm at > 10 kV, 2.5 nm at 1 kV, and 3.5 nm at 500 eV
  • Accelerating voltage is continuously variable between 200 V and 30 kV with automatic adaptation of focus, magnification and image shift
  • Beam current is software adjustable with maximum beam current > 25 nA at 10 kV and > 0.5 pA at 500 eV
  • Beam current stability is less than 0.4% / 10 hours
  • Objective lens with dual mode of operation: High Resolution (HR) mode and Ultra High Resolution (UHR) mode, both operational over a wide range of working distances
  • Focus range is from 0 to 45 mm FWD in the HR mode and 1 to 7 mm FWD at 1 kV and 5 to 7 mm at 20 kV in the UHR mode
  • There is a dedicated mouse function for focus with focus sensitivity automatically adjusted to magnification
  • Dynamic focus up to ±80° of specimen tilt
  • 8-pole electromagnetic stigmator with simultaneous X-Y control and visualization mode. Automatic stigmation standard
  • Continuous electronic image shift up to ±20 µm XY in HR mode and ±5 µm in UHR mode is possible; the image shift's sensitivity is automatically adjusted to magnification and direction consistent and independent of scan rotation
  • Continuous magnification between 40x and 400,000x at eucentric WD and all scan rates in HR mode and 2500x to 1,200,000x in UHR mode
  • 12 selectable line times from 0.21 ms to 240 ms per line; 8 selectable frames from 484 to 3872 lines per picture (total of 96 combinations); TV mode
  • Digital line scan with 3 selections of points per line: 180, 360 or 720 and 6 dwell times from 30 to 1000 ms; Maximum line time 12 min.
  • Scanning modes: full frame, adjustable reduced raster, line X, spot
  • Ion getter pumps for gun and intermediate vacuum with column separation valve and maglev turbomolecular pump for chamber pumping
  • Analytical specimen chamber with inside diameter of 284 mm and 9 ports
  • 50 x 50 mm 5-axes motorized stage; a high precision eucentric tilt specimen stage with motorized X, Y, Z, rotation and tilt; control and readout of these movements is via the XL Graphics User Interface
  • X,Y = 50 mm
  • Z = 25 mm external adjustment range and 25 mm internal adjustment range
  • Tilt = -15° to +75° at 10 mm FWD
  • Graphics includes micron-marker and databar containing user selected microscope parameters; an enhanced graphics editor is available
  • Image transfer in TIFF (8 or 16 bit), BMP, or JPEG format


Special Notes / Additional Comments:

  • Unit Equipped with EDAX Falcon EDS System for elemental analysis of materials
  • Simultaneous imaging and EDS at 5 mm WD with high EDS TOA of 35 degrees


Contact Information:

For additional information regarding the FEI Field Emission SEM / Sirion or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it. using the telephone number or e-mail address below. 


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Phone: (805) 893-3918 ext. 208
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