Equipment Status
  • GCA 6000 March Maintenance
    10 February 2020

    The GCA 6300 will be down for maintenance beginning 8:30am Monday March 9, 2020 until 6:30pm March 11, 2020. Silva 10:40, 10 February 2020 (PST)

  • GCA Autostep 200 March Maintenance
    10 February 2020

    The Autostep 200 will be down for maintenance the morning of March 12, 2020 until late afternoon the same day. Silva 10:40, 10 February 2020 (PST)

  • ASML Maintenance: March 30th
    27 January 2020

    ASML Stepper #3 periodic maintenance will be on Monday March 30th, system will be down for up to 1.5 weeks. // John d 07:30, 27 January 2020 (PST)

  • Unaxis ICP-PECVD
    19 November 2019

    The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)