The UCSB Nanofabrication facility cleanroom consists of over 12000 ft2 of class 100 and 1000 clean floor space, in a bay and chase configuration, to host a wide variety of thin-film processing equipment.  The cleanroom consists of 2 class 100 bays for optical and electron beam lithography and 5 class 1000 bays for other process equipment.  A complete description of our tools is available on the equipment web page.  A spacious gowning room accomodates up to 350 researchers at any given time and each researcher is given space and utilities for sample and small tool storage.  The cleanroom provides bunnysuits, chemicals, source materials for thin film processes, boxes for storage, cleanroom notebooks, and other small ancillaries as part of the recharge rate.  Safety procedures and systems are in place to ensure a safe working environment.  Training on all systems is required to use our facility.  Equipment sign-up is done via a web-based system.  Some pictures of the facility are below.

Gowning RoomBay 2 pictureBay 3 pictureBay 6 Picture

Equipment Status
  • Lab Shutdown for Exhaust Fan Installation
    17 May 2019

    The cleanroom will be DOWN from 7am to ~1pm on Friday, May 24th. An email will be sent out once the lab is back up and running. Hopkins a 09:43, 17 May 2019 (PDT)

  • SLR Fluorine ICP Etch
    02 May 2019

    The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. Silva 07:15, 2 May 2019 (PDT)

  • Suss Bonder
    12 April 2019

    Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)