The UCSB Nanofabrication facility cleanroom consists of over 12000 ft2 of class 100 and 1000 clean floor space, in a bay and chase configuration, to host a wide variety of thin-film processing equipment.  The cleanroom consists of 2 class 100 bays for optical and electron beam lithography and 5 class 1000 bays for other process equipment.  A complete description of our tools is available on the equipment web page.  A spacious gowning room accomodates up to 350 researchers at any given time and each researcher is given space and utilities for sample and small tool storage.  The cleanroom provides bunnysuits, chemicals, source materials for thin film processes, boxes for storage, cleanroom notebooks, and other small ancillaries as part of the recharge rate.  Safety procedures and systems are in place to ensure a safe working environment.  Training on all systems is required to use our facility.  Equipment sign-up is done via a web-based system.  Some pictures of the facility are below.

Gowning RoomBay 2 pictureBay 3 pictureBay 6 Picture

Equipment Status
  • Nanofab Yearly Shutdown
    09 December 2019

    The cleanroom will be closed from 12/25/19 at noon until 12/27/19 at 5pm for our yearly maintenance. No one will be allowed inside the lab during this time. An email will be sent out once the cleanroom is safe to enter. Please plan accordingly. Hopkins a 15:30, 9 December 2019 (PST)

  • Unaxis ICP-PECVD
    19 November 2019

    The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)

  • Suss Bonder
    25 October 2019

    Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)