Use of Facility and Equipment

These rates include training:

  • Academic: $37.50/hour
  • Industrial: $139/hour

E-beam Lithography Equipment Use

  • Academic: $180/hour
  • Industrial: $540/hour

Dedicated Staff Support

$100/hour for academic users (training included in the rates above)

$150/hour for industrial users (training included in the rates above)

Additional Resources Available at UCSB

Facility users will benefit by having access to multiple labs on campus to perform their research.  The list of Mult-User Labs can be found at the following website:

Equipment Status
  • Lab Shutdown for Exhaust Fan Installation
    17 May 2019

    The cleanroom will be DOWN from 7am to ~1pm on Friday, May 24th. An email will be sent out once the lab is back up and running. Hopkins a 09:43, 17 May 2019 (PDT)

  • SLR Fluorine ICP Etch
    02 May 2019

    The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. Silva 07:15, 2 May 2019 (PDT)

  • Suss Bonder
    12 April 2019

    Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)