Use of Facility and Equipment

These rates include training:

  • Academic: $37.50/hour
  • Industrial: $139/hour

E-beam Lithography Equipment Use

  • Academic: $180/hour
  • Industrial: $540/hour

Dedicated Staff Support

$100/hour for academic users (training included in the rates above)

$150/hour for industrial users (training included in the rates above)

Additional Resources Available at UCSB

Facility users will benefit by having access to multiple labs on campus to perform their research.  The list of Mult-User Labs can be found at the following website:

https://www.bfs.ucsb.edu/procurement/revenue-contracts/multi-user-lab-access

Equipment Status
  • Nanofab Yearly Shutdown
    09 December 2019

    The cleanroom will be closed from 12/25/19 at noon until 12/27/19 at 5pm for our yearly maintenance. No one will be allowed inside the lab during this time. An email will be sent out once the cleanroom is safe to enter. Please plan accordingly. Hopkins a 15:30, 9 December 2019 (PST)

  • Unaxis ICP-PECVD
    19 November 2019

    The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)

  • Suss Bonder
    25 October 2019

    Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)