Equipment Status
  • SLR Fluorine ICP Etch
    17 June 2019

    The turbo upgrade on the SLR Fluorine ICP Etch will start Wednesday June 19, 2019 and will conclude Thursday afternoon. Silva 09:40, 17 June 2019 (PDT)

  • ASML Stepper #3: Periodic Maintenance
    28 May 2019

    ASML will be performing their quarterly maintenance on Stepper #3 from Monday June 17th to Friday June 21st. Exact days may vary, we will email updates when we know exactly which days the tool will be closed. // John d 12:55, 28 May 2019 (PDT)

  • Suss Bonder
    12 April 2019

    Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)