Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.  UCSB and other academic and industrial researchers utilize the facility through a recharge system that allows the laboratory to operate and keep high quality professional staff for facility and equipment support as well as expert process consultation and hands-on fabrication assistance.  The facility is committed to a high level of professional staff support and to increasing the capabilities of the laboratory with regular improvement of existing equipment and aquisition of high quality used and new micro and nanofabrication systems.  We welcome academic and industrial researchers to use our facility.

The professional staff at the UCSB nanofabrication facility is comprised of industry and research experienced engineers and scientists that can assist users in several ways.

  • Performing regular, high quality tool maintenance
  • Equipment troubleshooting
  • Customizing fixturing for specific process needs
  • Group or individual equipment training
  • Process support, troubleshooting, and consultation
  • Hands-on fabrication work for remote users

The UCSB Nanofabrication facility cleanroom consists of over 12000 ft2 of class 100 and 1000 clean floor space, in a bay and chase configuration, to host a wide variety of thin-film processing equipment.  The cleanroom consists of 2 class 100 bays for optical and electron beam lithography and 5 class 1000 bays for other process equipment.  A complete description of our tools is available on the equipment web page.  A spacious gowning room accomodates up to 350 researchers at any given time and each researcher is given space and utilities for sample and small tool storage.  The cleanroom provides bunnysuits, chemicals, source materials for thin film processes, boxes for storage, cleanroom notebooks, and other small ancillaries as part of the recharge rate.  Safety procedures and systems are in place to ensure a safe working environment.  Training on all systems is required to use our facility.  Equipment sign-up is done via a web-based system.  Some pictures of the facility are below.

Gowning RoomBay 2 pictureBay 3 pictureBay 6 Picture

Equipment Status
  • IBD
    08 November 2019

    The IBD is Down for maintenance. The system will be down until late next week, 11/15/19, or early the following week. We will send out an email once the system is ready to use. Silva 15:21, 8 November 2019 (PST)

  • Cleanroom Shutdown on 11/21
    06 November 2019

    The cleanroom will be closed from 7-9am on Thursday, November 21st for fire system testing. No one will be allowed in the lab during this time. Please plan accordingly. Hopkins a 15:44, 6 November 2019 (PST)

  • Suss Bonder
    25 October 2019

    Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)