Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.  UCSB and other academic and industrial researchers utilize the facility through a recharge system that allows the laboratory to operate and keep high quality professional staff for facility and equipment support as well as expert process consultation and hands-on fabrication assistance.  The facility is committed to a high level of professional staff support and to increasing the capabilities of the laboratory with regular improvement of existing equipment and aquisition of high quality used and new micro and nanofabrication systems.  We welcome academic and industrial researchers to use our facility.

The professional staff at the UCSB nanofabrication facility is comprised of industry and research experienced engineers and scientists that can assist users in several ways.

  • Performing regular, high quality tool maintenance
  • Equipment troubleshooting
  • Customizing fixturing for specific process needs
  • Group or individual equipment training
  • Process support, troubleshooting, and consultation
  • Hands-on fabrication work for remote users

The UCSB Nanofabrication facility cleanroom consists of over 12000 ft2 of class 100 and 1000 clean floor space, in a bay and chase configuration, to host a wide variety of thin-film processing equipment.  The cleanroom consists of 2 class 100 bays for optical and electron beam lithography and 5 class 1000 bays for other process equipment.  A complete description of our tools is available on the equipment web page.  A spacious gowning room accomodates up to 350 researchers at any given time and each researcher is given space and utilities for sample and small tool storage.  The cleanroom provides bunnysuits, chemicals, source materials for thin film processes, boxes for storage, cleanroom notebooks, and other small ancillaries as part of the recharge rate.  Safety procedures and systems are in place to ensure a safe working environment.  Training on all systems is required to use our facility.  Equipment sign-up is done via a web-based system.  Some pictures of the facility are below.

Gowning RoomBay 2 pictureBay 3 pictureBay 6 Picture

Equipment Status
  • GCA Autostep Maintenance Sept 23 - Sept 25
    18 September 2019

    3C Technical will be here to service the GCA Autostep from Monday September 23 thru Wednesday September 25. The service will begin at 8:00am Monday morning, and will conclude by 6:00pm Wednesday. Silva 10:36, 18 September 2019 (PDT)

  • GCA 6300 Maintenance Sept 26
    18 September 2019

    3C Technical will be here to service the GCA 6300 on Thursday September 26. The service will begin at 8:00am Thursday morning, and will finish by 6:00pm that day. Silva 10:36, 18 September 2019 (PDT)

  • ASML Stepper: Maintenance Sept 30 - Oct 4
    18 September 2019

    ASML will be performing quarterly maintenance from Monday Sept. 30th to Friday Oct. 4th, please plan for the tool to be down during this time. // John d 08:39, 18 September 2019 (PDT)

  • Suss Bonder
    13 September 2019

    Suss Bonder is DOWN. The vendor installed all the hardware but failed to get the software to work. The vendor will be back sometime next week, the week of the 16th, to complete the repair/upgrade. Silva 15:59, 13 September 2019 (PDT)


  • Logitech Wafer Bonder: Down
    12 September 2019

    There's an issue with the heater and chamber assembly, awaiting replacement parts for the repair. Estimate 3 weeks to receive the replacement part. Silva 09:42, 12 September 2019 (PDT)