Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.  UCSB and other academic and industrial researchers utilize the facility through a recharge system that allows the laboratory to operate and keep high quality professional staff for facility and equipment support as well as expert process consultation and hands-on fabrication assistance.  The facility is committed to a high level of professional staff support and to increasing the capabilities of the laboratory with regular improvement of existing equipment and aquisition of high quality used and new micro and nanofabrication systems.  We welcome academic and industrial researchers to use our facility.

The professional staff at the UCSB nanofabrication facility is comprised of industry and research experienced engineers and scientists that can assist users in several ways.

  • Performing regular, high quality tool maintenance
  • Equipment troubleshooting
  • Customizing fixturing for specific process needs
  • Group or individual equipment training
  • Process support, troubleshooting, and consultation
  • Hands-on fabrication work for remote users

The UCSB Nanofabrication facility cleanroom consists of over 12000 ft2 of class 100 and 1000 clean floor space, in a bay and chase configuration, to host a wide variety of thin-film processing equipment.  The cleanroom consists of 2 class 100 bays for optical and electron beam lithography and 5 class 1000 bays for other process equipment.  A complete description of our tools is available on the equipment web page.  A spacious gowning room accomodates up to 350 researchers at any given time and each researcher is given space and utilities for sample and small tool storage.  The cleanroom provides bunnysuits, chemicals, source materials for thin film processes, boxes for storage, cleanroom notebooks, and other small ancillaries as part of the recharge rate.  Safety procedures and systems are in place to ensure a safe working environment.  Training on all systems is required to use our facility.  Equipment sign-up is done via a web-based system.  Some pictures of the facility are below.

Gowning RoomBay 2 pictureBay 3 pictureBay 6 Picture

Equipment Status
  • GCA 6000 March Maintenance
    10 February 2020

    The GCA 6300 will be down for maintenance beginning 8:30am Monday March 9, 2020 until 6:30pm March 11, 2020. Silva 10:40, 10 February 2020 (PST)

  • GCA Autostep 200 March Maintenance
    10 February 2020

    The Autostep 200 will be down for maintenance the morning of March 12, 2020 until late afternoon the same day. Silva 10:40, 10 February 2020 (PST)

  • ASML Maintenance: March 30th
    27 January 2020

    ASML Stepper #3 periodic maintenance will be on Monday March 30th, system will be down for up to 1.5 weeks. // John d 07:30, 27 January 2020 (PST)

  • Unaxis ICP-PECVD
    19 November 2019

    The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)