Use Our Facility

Need a research tool, but would rather not buy it? You can rent it in a new nanofabrication facility with 12,700 ft² of clean room space to work in!

Affordable rates provide you with the tools you need, as well as training and support from our dedicated and knowledgeable staff, that is tailored to your specific research needs.

We support a broad line of lithography, thin-film deposition, reactive ion etching, and characterization tools in support of device fabrication for a variety of materials, including InP, GaAs, GaN, SiC, Si, and other novel materials.

Staff support is available for training, tool fixturing, process consultation, and hands-on work.

Over 40% of our more than 500 per annum user community are from outside academic institutions and industry, doing significant research in our facility.

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Equipment Status
  • IBD
    09 July 2019

    The IBD is DOWN for maintenance. The service can take up to 2 weeks to complete. Silva 11:03, 9 July 2019 (PDT)

  • E-Beam#2
    03 July 2019

    E-Beam#2 will be down July 24, 2019 until August 9, 2019 for the EBC and power supply upgrade. Silva 16:09, 3 July 2019 (PDT)

  • Suss Bonder
    12 April 2019

    Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)