New access protocols  on the Nanofab Wiki:

UC 

Santa Barbara

Nanofabrication Facility

Bay 4 | metrology

The UCSB NanoFabrication facility combines world-class cleanrooms with expert staff to help our users do the impossible - no matter how small

Researchers
Faculty
Industry

Staff support on your research and fabrication needs

Access a wealth of process development information on our Process Wiki

Collaborative environment for early stage R&D

Strong publications record, see the publications list

Wide support for non-standard materials and processes

Staff support on R&D fabrication, design and DOE

High tool up-time and staff responsiveness

Proven record with industrial prototyping and transition to various levels of production

See how we can help you with your next project

State-of-the-Art

Cleanroom Facilities

12000 sqft. of class 100 and 1000 clean floor space

2 class 100 bays for optical and electron beam lithography and 5 class 1000 process bays

A spacious gowning room and supplies storage to accommodate up to 350 researchers

Equipment reservation via a web-based system

Extensive process and tool documentation accessible through the cleanroom wiki

Secure, 24-hour access to our facilities

Litho Bay #2

Litho Bay #1

Acid Bay

Furnace Bay

Deposition Bay

Etch Bay

User Supplies / Storage

SEM

User Supplies / Storage

Entryway

Hangers / Racks

Gowning Room

Experienced & Knowledgable Staff

The professional staff at the UCSB nanofabrication facility is comprised of experienced industry and research engineers and scientists, assisting users in a variety of ways

Regular, high quality tool maintenance

Process support, troubleshooting, and consultation

Customized setups for specific process needs

Equipment/process troubleshooting

Group or individual equipment training

Tool Status

News

 

Select Publications

 

We thank these companies and organizations for their contributions:

UC Santa Barbara NanoFabrication Facility

Engineering Sciences Building (Bldg. #225),

Santa Barbara, CA 93106

Office Hours

M-F 8am - 5pm

Contact