National Nanotechnology Infrastructure Network

The UCSB Nanofabrication facility is part of the National Nanotechnology Infrastructure Network (NNIN). The NNIN is an integrated partnership of fourteen user facilities that is dedicated to providing high-precision processing equipment. NNIN is supported by expert personnel and the latest in computer design aids. The combination of facilities, equipment, and expertise provided by the members of the network is unsurpassed in any single research laboratory. By promoting matches between enabling fabrication technology with research goals across a broad range of disciplines, the network hopes to open possibilities for new research breakthroughs. If we can't help you, we will try to find someone who can!

 

For further information on the NNIN, please visit: www.nnin.org

Mission: Support Nanofabrication Research

Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.  UCSB and other academic and industrial researchers utilize the facility through a recharge system that allows the laboratory to operate and keep high quality professional staff for facility and equipment support as well as expert process consultation and hands-on fabrication assistance.  The facility is committed to a high level of professional staff support and to increasing the capabilities of the laboratory with regular improvement of existing equipment and aquisition of high quality used and new micro and nanofabrication systems.  We welcome academic and industrial researchers to use our facility.

Experienced and Knowledgeable Staff

The professional staff at the UCSB nanofabrication facility is comprised of industry and research experienced engineers and scientists that can assist users in several ways.

  • Performing regular, high quality tool maintenance
  • Equipment troubleshooting
  • Customizing fixturing for specific process needs
  • Group or individual equipment training
  • Process support, troubleshooting, and consultation
  • Hands-on fabrication work for remote users

Class 100 and 1000 Clean Rooms

The UCSB Nanofabrication facility cleanroom consists of over 12000 ft2 of class 100 and 1000 clean floor space, in a bay and chase configuration, to host a wide variety of thin-film processing equipment.  The cleanroom consists of 2 class 100 bays for optical and electron beam lithography and 5 class 1000 bays for other process equipment.  A complete description of our tools is available on the equipment web page.  A spacious gowning room accomodates up to 350 researchers at any given time and each researcher is given space and utilities for sample and small tool storage.  The cleanroom provides bunnysuits, chemicals, source materials for thin film processes, boxes for storage, cleanroom notebooks, and other small ancillaries as part of the recharge rate.  Safety procedures and systems are in place to ensure a safe working environment.  Training on all systems is required to use our facility.  Equipment sign-up is done via a web-based system.  Some pictures of the facility are below.

Gowning RoomBay 2 pictureBay 3 pictureBay 6 Picture

Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.