Electron-Beam Evaporation System

Electron-Beam Evaporation System

Equipment Description:
Electron-Beam Evaporation System

Manufacturer:
Temescal

 

 

 

 

 

 

 

General Information and Usage:

This electron-beam evaporation system is used for the controlled deposition of thin dielectric films. The films are evaporated from a wide variety of solid sources. The most common dielectrics deposited are: SiO2, SiO, TiO2, Ta2O5, SrF2. Other materials may be evaporated upon request. Oxygen gas can be bled into the system during deposition to try to maintain the stoichiometry during deposition. Fixturing for heating the substrate can also be used. A crystal thickness monitor is used to control the deposition thickness. The dielectrics deposited by this system are typically used for optical coatings (anti-reflective and highly reflective multiple layer stacks), electrical insulators, and reactive ion etching masks. Samples up to ~ 3” x 3” can be placed into this system for evaporation. Typical deposition rates are several Angstroms/second.

 

Detailed Specifications:

  • Temescal 10kV power supply
  • Temescal 4-pocket series 260 e-beam source
  • Electron beam controller with sweep rate and amplitude control
  • Cryo-pumped system with ~ 1e-7 ultimate base pressure
  • Automatic vacuum sequencing
  • Crystal thickness monitoring
  • Sample size: up to 3” x 3” pieces
  • Oxygen bleed for maintaining oxide stoichiometry

 

Contact Information:

For additional information regarding the Electron-Beam Evaporation System or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below. 

 

This email address is being protected from spambots. You need JavaScript enabled to view it.
Phone: (805) 893-3918 ext. 217
E-Mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

 

Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.