Deep UV Flood Exposer

Deep UV Flood Exposer / Light Source

Equipment Description:
Deep UV Flood Exposer / Light source and HA-1KC2 power supply

Manufacturer:
A B Manufacturing
6280-L San Ignacio Ave.
San Jose, CA 95119
Telephone: (408) 972-5085

 

 

 

 

 

 

 

 

General Information and Usage:

This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.

Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.

 

Equipment Specifications:

  • DUV wavelengths are 200-260 nm; the lamp power is limited to either 1250 or 2100 watts and can operate in either constant intensity or constant power mode
  • The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
  • Exposure can be performed on a 4" wafer
  • Link to Spectra

 

Special Notes/Additional Comments:

  • Lamps are nominally rated for 400 hours
  • A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation

 

Contact Information:

For additional information regarding the Deep UV Flood Exposer / Light Source or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below.

This email address is being protected from spambots. You need JavaScript enabled to view it.

Phone: (805) 893-3918 ext. 219

E-Mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

 


Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.