Processing Recipes

MEMS

Processing at the UCSB Nanofabrication Facility

We have an extensive range of equipment and processes for micro and nano device fabrication.

Processing in our facility can be done remotely or in person. Complex process and device development projects should be done in person with staff assistance.

Getting started: To submit a job proposal, please click here. For a discussion of how our tools may serve your needs, please contact This email address is being protected from spambots. You need JavaScript enabled to view it. at (805)893-2268 This email address is being protected from spambots. You need JavaScript enabled to view it. . If the process requires another more suitable match elsewhere, we will do our best to find a suitable connection for you.


 

Recipes & Guidelines for Processing in the UCSB Nanofabrication Facility

Please note that recipes are generally not transferrable to systems in other laboratories. However, some of the information is general and can be used in similar facilities. Pictures representative of the processes, data of the quality of processes, links to related sites, and particular details of a certain process are included where data is available and documented. Processes will also be linked to particular equipment, and equipment will be linked to processes where appropriate.

For a more detailed discussion of processes and results, please contact This email address is being protected from spambots. You need JavaScript enabled to view it. at (805)893-8174 This email address is being protected from spambots. You need JavaScript enabled to view it. .

We are working on the first round of web pages, so some of the process sections are not finished. The process website section will be updated as processes are documented.

Lithography

Dry Etching

  • III-V compound semiconductor etching
  • II-VI compound semiconductor etching
  • IV-IV compound semiconductor etching
  • Silicon etching
  • Silicon Oxide and Nitride etching
  • Other Dielectrics
  • Metals

Links to these recipes are a work in progress.

Deposition

This page is under construction.

Annealing

This page is under construction.

Wet Processing

This page is under construction.

Training Videos

This page is under construction.

 

Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.