Spin Coat Benches

spin wet bench

Equipment Description:
Spin Wet Bench

Manufacturer:
Pure Aire Corporation
2219 Agate Court
Simi Valley, California 93065-1839
Phone: (805) 527-1622
Fax: (805) 527-2664

Model:
Custom

 

 

General Information and Usage:

The facility contains 3 stainless steel solvent benches for photoresist spin coating. The benches consist each of 2 integrated Headway PWM32 series photoresist spinners. Overhead and foot controls are provided. 8 preprogrammed recipes and 2 user-programmable recipes are offered. Automatic wafer lifting and centering stations are offered for spinning large wafers up to 8” in diameter. 6” or 8” Cee ultra-flat hotplates with 0.1°C temperature stability are preset for standard resist bake temperatures (90, 95, 100, 105, 110, 115°C). Other user-changeable hot plates are also provided. Nitrogen guns are also on both sides of the bench. Large resist bottles are stored in a refrigerator amd small user bottles are stored by group in a ventilated steel cabinet. Waste pipets and resist soaked wipes are collected for disposal. A list of stocked resists appears on the lithography processing web page. Other chemicals should be OK'd by laboratory staff prior to use in the laboratory.

 

Detailed Specifications:

  • 2 Headway PWM32 spinners per bench, multi-step programming
  • 8 preset spin programs, 2 user defineable
  • Variety of wafer chucks for 5 mm x 5 mm pieces to 6” wafers
  • Lifters for large wafer centering
  • Preset 0.1°C stable, ultra-flat hotplates (90, 95, 1100, 105, 110, 115°C)
  • NO WAX on hotplates
  • Other hotplates for user defined temperatures
  • Hepa filtered laminar flow for Class 100
  • Manual dispense of resist; particle filtering available

 

Contact Information:

For additional information regarding the Spin Coat Benches or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below. 


This email address is being protected from spambots. You need JavaScript enabled to view it.
Phone: (805) 893-3918 ext. 208
E-Mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.