Dektak Profilometer

Dektak Profilometer Dektak Profilometer

Equipment Description:
Dektak Profilometer

Manufacturer:
Sloan (now Veeco)

 

 

 

 

 

General Information and Usage:

The Dektak is a profilometer for measuring step heights or trench depths on a surface. This is a surface contact measurement technique where a very low force stylus is dragged across a surface. The display range of the data is 200 A to 655,000 A (65.5 um) with a vertical resolution of ~ 5 A. The lateral resolution is limited by the tip shape. A video camera with variable magnification allows for manual placement of the stylus and the system is programmed for scan length and speed. Data leveling is done in the software and printouts with cursor locations and step heights are provided. The data can also be saved to a PC for further analysis.

 

Detailed Specifications:

  • 20 mm maximum sample thickness
  • Display range of 200 A up to 655,000 A (65.5 um)
  • ~ 5 A vertical resolution
  • Standard stylus radius is 12.5 um
  • 5 inch stage diameter with manual controls for moving and leveling
  • Software data leveling
  • Data markers for step height and thermal printouts of data
  • Data can be exported to a PC

 

Contact Information:

For additional information regarding the Detak Profilometer or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below. 


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Phone: (805) 893-3918 ext. 219
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Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.