Facility
SlidesFilmetrics
Equipment Description:
Filmmetrics
Manufacturer:
Filmetrics
Model:
F20
General Information and Usage:
This tool is for thickness and optical property measurements of films on substrates. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (400 nm – 850 nm) from the surface. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. The accuracy of the technique will depend on the thickness of the film and the optical models used for the fitting of the data. For a more complete description go to www.filmetrics.com.
Detailed Specifications:
- 400-850 nm reflection spectrum
- 150 A to 50 um thickness only measurement
- 1000 A to 10 um thickness, n, and k measurements
- 1 nm accuracy at 500 nm thickness
- Manual wafer placement
- Data can all be saved
- Can model up to three layers
Contact Information:
For additional information regarding the Filmetrics or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it. using the telephone number or e-mail address below.
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Phone: (805) 893-3918 ext. 217
E-Mail:
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