Nanonex NX2000

Nanonex NX 2000Equipment Description:
Manufacturer: Nanonex
Model: NX2000

Manufacturer:
Nanonex, Inc.
1 Deer Park Drive, Ste. O
Monmouth, NJ 08852

 

 

 

 

 

General Information and Usage:

The Nanonex NX2000 is a nanoimprinting system that allows for direct pattern transfer from a pre-fabricated master mold into an underlying polymer material. Lateral feature sizes down to less than 10 nm have been demonstrated on this tool. The system can do thermal imprinting into a polymer at temperatures up to 200°C and chamber pressures up to 600 psi. The system can also imprint into and cure UV-cureable materials on top of underlayer polymers in order to planarize samples and provide for high aspect ratio imprint lithography. Since the system uses no rigid plates, but air pressure only, the pressure uniformity is excellent in the system. The heating and cooling rates are as high as 300°C/min. Several types of resists are supplied, including NX1020, NX2010, and mr-I-7000. The system is capable of handling piece parts up to 100 mm wafers. An additional alignment system is also available for 100 mm wafers for aligned imprinting. Non-stick coatings for master molds can also be provided. For creation of master molds, please call for a discussion of our other capabilities, including electron-beam lithography.

 

Detailed Specifications:

  • Thermal imprinting up to 200°C and 600 psi chamber pressure (equivalent to 1200 psi on the wafer stack); 300°C/min heat-cool rates
  • UV-imprinting
  • In-house resist processes and subsequent pattern transfer offered
  • Resolution: 10 nm demonstrated
  • Minimum substrate size: small pieces
  • Largest substrate size: 100 mm wafer
  • Several resists, non-stick layers, and master copy formation also available

Contact Information:

For additional information regarding the Nanonex NX2000, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below.

This email address is being protected from spambots. You need JavaScript enabled to view it.
Phone: (805) 893-3918 ext. 217
E-Mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

 

Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.