ORBIS Chemical Mechanical Polisher

 

Equipment Description:

ORBIS Chemical Mechanical Polisher

 

Manufacturer:

Logitech

 

Link: 

http://www.logitech.uk.com/cmp.asp

 

The Logitech Orbis system is used in the facility for fine-scale polishing and planarization of a variety of materials including glass, silicon, GaAs,  InP,  GaN, etc.  Wafers up to 6” diameter can be polished on the system.  Several slurries and pads are available to provide a range of polishing options depending on the material being processed.  Pieces can also be handled on the system.  Each process is often unique in geometry and material combinations so that independent process development is required for most CMP applications.  Logitech directly assists our users through expert consultation.

 

Contact Information:

For additional information regarding the ORBIS Chemical Mechanical Polisher or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below. 


This email address is being protected from spambots. You need JavaScript enabled to view it.
Phone: (805) 893-3918 ext. 216
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Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.