Dektak VI Profilometer

dektakVI profilometer Dektak VI Profilometer

Equipment Description:
Surface Profilometer

Manufacturer:
Veeco Metrology, LLC
112 Robin Hill Road
Santa Barbara, CA 93117

 

 

 

 

 

General Information and Usage:

The Dektak VI is a profilometer for measuring step heights or trench depths on a surface. This is a surface contact measurement technique where a very low force stylus is dragged across a surface. The Dektak VI offers Windows based data acquisition, data analysis, and equipment control. The force of the tip on the surface is adjustable from .03 mg to 15 mg, allowing for the measuring of hard and soft surfaces. A stress measurement option is also included with this tool. The profilometer can measure to a depth of over 1 mm, allowing for direct measurement of MEMs type structures. Lateral resolution is tip-shape dependent and vertical resolution is 1A (when using the 6.55 mm range). The lateral resolution is limited by the tip shape. A video camera with variable magnification allows for manual placement of the stylus using the manual X, Y, Theta stage. Software analysis can determine roughness, average step height, etc.

 

Detailed Specifications:

  • 20 mm maximum sample thickness
  • .03 mg to 15 mg variable tip force
  • Height/Depth measurements to 1 mm
  • 1 A vertical resolution at 6.5 um full scale
  • Standard stylus radius is 12.5 um, optional 2 um stylus available
  • 6 inch stage diameter with manual controls for moving and leveling
  • Software data leveling and other analysis including stress
  • Full GUI-based Windows control and data storage and exporting capability

 

Contact Information:

For additional information regarding the Detak VI Profilometer or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below. 


This email address is being protected from spambots. You need JavaScript enabled to view it.
Phone: (805) 893-3918 ext. 219

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Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.