Karl-Suss MA-BA-6 Mask / Bond Aligner with Backside Optics

Karl-Suss MA-BA-6 Mask / Bond Aligner with Backside Optics

Equipment Description:
Karl Suss Mask Aligner/Bond Aligner

Manufacturer:
Karl Suss America, Inc.
P.O. Box 157
Suss Drive
Waterbury Center, Vt. 05677
Phone: (802) 244-5181
Fax: (802) 244-5103

Model:
MA/BA-6

Contact Lithography Processing

 

 

General Information and Usage:

This system is a dual-use mask aligner and wafer-bond aligner. Mask alignment is used for contact and proximity exposure processes. Exposures can be done with gaps programmable from 0 um to 300 um in 1 um increments. Automatic wedge compensation is used to ensure that the mask and wafer are parallel. Lithography can be done on wafers from 2” to 6” in diameter. Piece parts are better handled on the MJB-3 aligners. An automated image capture system is used for alignment at 5x, 10x, or 20x magnification. Programs are stored as recipes on the computer controlled unit. The system is fitted with visible, bottom-side optics, back-side alignment capability. The lamp is a 350 W Hg-Arc lamp, providing significant power in the g-h-and i-line regime. Integrated light level sensing ensures proper exposure doses as the lamp degrades. Bond alignment can be done on 3” to 6” wafers. The bond alignment is done with special fixturing to allow aligned samples to be transferred to the Karl-Suss SB6 system.

 

Equipment Specifications:

  • 350 W Hg arc lamp, broadband exposure with Suss UV400 Optics
  • Automatic Light Intensity Drift Compensation
  • Programmable recipes
  • Programmable exposure gaps of 0-300 um in 1 um steps
  • Stored video imaging for precise, repeatable alignment
  • Visible Back-Side Alignment System
  • Lithography for 2” to 6” diameter wafers
  • Bond alignment for 3” to 6” wafers, integrates with SB6 bond
  • Other wafer sizes can be discussed with staff

 

Contact Information:

For additional information regarding the Karl-Suss MA/BA-6 aligner or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below. 


Don Freeborn
Phone: (805) 893-3918 ext. 216
E-Mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

 

Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.