Woolam Spectroscopic Ellipsometer

Woolam Spectroscopic Ellipsometer

Equipment Description:
Woolam Spectroscopic Ellipsometer

Model:
M2000DI VASE

Manufacturer:
J. A. Woolam Co.
645 M Street, Suite 102
Lincoln, NE  68508-2243
Telephone: 402-477-7501
www.jawoollam.com

 

 

 

General Information and Usage:

The Woolam M2000DI Variable Angle Spectroscopic Ellipsometer is used for the general characterization of optical thin films using ellipsometry.  This tool incorporates a wavelength range from 193nm up to 1650nm and a motorized variable angle control from 45 degrees to 90 degrees in order to provide the widest flexibility for characterization of optical (and some electrical) properties of thin films.  The CompletEASE software makes measurement taking and simple analysis very straightforward and provides for complex multi-layer and absorbing film analysis as well.  All data is saved for each film so that post-measurement analysis can be performed.  This system is also in-situ capable for the ALD system in the facility.

 

Contact Information:

For additional information regarding the Woolam Spectroscopic Ellipsometer or if you would like to inquire about using the UCSB Nanofabrication Facility, please contact This email address is being protected from spambots. You need JavaScript enabled to view it.  using the telephone number or e-mail address below. 


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Phone: (805) 893-2268

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Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.