skip to:
page content
|
links on this page
|
site navigation
|
footer (site information)
Nanotech—The UCSB Nanofabrication Facility
Complementing your research tools, supporting your research needs
Home
Nanofabrication Facility
Training Resources
Research
Education
Calendar
Newsletter
Nanotech is part of the National Nanotechnology Infrastructure Network
Section Link
Contact Us
Research
Education
Calendar
Newsletter
Nanofabrication Facility
Capabilities (Overview)
Equipment List
Rates
Interactive Facility Map
Location
Processing
Lithography
Dry Etching
Deposition
Annealing
Wet Processing
Training Videos
Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.
Electronic Beam Lithography
MJB-3 with IR-Backside Alignment
Aligner with No Filter
Aligner with Filter for i-line exposure
DUV Exposure System Spectra
©2006 Board of Regents of the University of California
Technical
and educational staff services
are possible through the generosity of the National Science Foundation through support via the NNIN.
