
Use Our Facility
Need a research tool, but would rather not buy it? You can rent it
in a new nanofabrication facility with, 12,700 ft² of clean room space
to work in!
Affordable
rates provide you with the tools you need, as well as training
and support from our dedicated and knowledgable staff, that is tailored
to your specific research needs.
We support a broad line of lithography, thin-film deposition,
reactive ion etching, and characterization tools in support of device
fabrication for a variety of materials, including InP, GaAs, GaN, SiC,
Si, and other novel materials.
New Academic User Fee Offset Program!
We are pleased to offer user fee offsets for non-UCSB affiliated Academic users that are new or have new projects with mimimal funding. This program will give researchers a way to test out their ideas and the facility with minimal risk. Fee offsets wil be up to $2000 for up to a one year period. Please submit all information requested in the application (link below). Applications will be awarded or denied as they are received.
Academic User Fee Offset Application
Make Research Progress in Beautiful Santa Barbara!
Nanotech is located in the new Engineering Sciences building
at the University of California, Santa Barbara—a world leader in
materials science, optoelectronic and electronic device research,
and nanofabrication.
Mission: Support Nanofabrication Research
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Workshops Available |
This includes:
- UCSB
- Academic Institutions (other than UCSB)
- Industries
- Government Agencies
We welcome both national and international users of our facility. |
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What We Offer You
Dedicated Staff
Assistance
- Equipment training
- Process consultation
- Hands-on work
- Troubleshooting
- Machine Maintenance
- Tool Modification
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Experienced and Knowledgable Staff The
UCSB nanofabrication facility offers expertise in semiconductor-based
device fabrication and thin-film processing, providing a broad
range of processes to the scientific and research communities,
including:
- Optical Lithography to 400 nm
- E-beam Lithography to below 30 nm
- Physical Vapor Deposition of Materials and Dielectrics
- Plasma Chemical Vapor Deposition
- Reactive Ion Etching
- Inductively Couples Plasma-based Etching
- High-Temperature Annealing
- Wafer Bonding
- Wet Chemical Processing
- Characterization
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Class 100 and
1000 Clean Rooms Benefiting from strong internal programs
in optoelectronics, high-speed electronic devices, and nanostructures,
Nanotech builds upon that infrastructure and expertise to provide
researchers with state-of-the-art processes and fabrication techniques
in these areas as well as
the full spectrum of techniques required for semiconductor
device fabrication. The total area of our fully operational
environment is roughly 12,700 square feet with both class 100
and 1000 areas.
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Convenient and Easy Access, and
BillingYou can use the facility day or night, whether it's
a holiday or not. If you have a pressing deadline to make, you
can access the facility 24 hours/day, 365 days/year (except on
leap year—you get an extra day!).
When you arrive, you can feel like James Bond for an instant,
while the lady's voice on the optical camera allows you access
to the facility. The optical camera compares your iris to the one
on file and opens the door. No more keeping track of room keys
or key cards!
Our system allows accurate tracking and billing for hours used.
Industries and academic institutions can be easily billed through
a simple recharge system. |
Additional Resources
Available at UCSB Facility users will benefit from the strong
internal program in materials research and characterization at
UCSB, through the user-accessible Materials Research Labs (MRL).
Materials Characterization capabilities include:
- Atomic Force
Microscopy
- Scanning Electron Microscopy
- Transmission Electron Microscopy
- Photoluminescence Spectroscopy
- X-ray Diffraction
- Scanning Auger Microscopy
- XPS
- SIMS
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National Nanotechnology
Infrastructure Network (NNIN)The UCSB Nanofabrication facility
is part of the National Nanotechnology Infrastructure Network
(NNIN). The NNIN is a partnership of 13 universities that is
dedicated to providing high-precision processing equipment in
sophisticated facilities, that is supported by expert personnel
and the latest in computer design aids. The combination of facilities,
equipment, and expertise provided by the members of the network
is unsurpassed in any single research laboratory. By promoting
matches between enabling fabrication technology with research
goals across a broad range of disciplines, the network hopes
to open possiblities for new research breakthroughs. If we can't
help you, we will try to find someone who can! |