Nanotech—The UCSB Nanofabrication Facility           Complementing your research tools, supporting your research needs

 
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Use Our Facility

Need a research tool, but would rather not buy it? You can rent it in a new nanofabrication facility with, 12,700 ft² of clean room space to work in!

Affordable rates provide you with the tools you need, as well as training and support from our dedicated and knowledgable staff, that is tailored to your specific research needs.

We support a broad line of lithography, thin-film deposition, reactive ion etching, and characterization tools in support of device fabrication for a variety of materials, including InP, GaAs, GaN, SiC, Si, and other novel materials.

 

New Academic User Fee Offset Program!

We are pleased to offer user fee offsets for non-UCSB affiliated Academic users that are new or have new projects with mimimal funding. This program will give researchers a way to test out their ideas and the facility with minimal risk. Fee offsets wil be up to $2000 for up to a one year period. Please submit all information requested in the application (link below). Applications will be awarded or denied as they are received.

Academic User Fee Offset Application

Make Research Progress in Beautiful Santa Barbara!

Nanotech is located in the new Engineering Sciences building at the University of California, Santa Barbara—a world leader in materials science, optoelectronic and electronic device research, and nanofabrication.

Mission: Support Nanofabrication Research

 
Workshops Available

 

This includes:
  • UCSB
  • Academic Institutions (other than UCSB)
  • Industries
  • Government Agencies

We welcome both national and international users of our facility.

 

 

 

 

What We Offer You

Dedicated Staff Assistance

  • Equipment training
  • Process consultation
  • Hands-on work
  • Troubleshooting
  • Machine Maintenance
  • Tool Modification

Experienced and Knowledgable Staff The UCSB nanofabrication facility offers expertise in semiconductor-based device fabrication and thin-film processing, providing a broad range of processes to the scientific and research communities, including:

  • Optical Lithography to 400 nm
  • E-beam Lithography to below 30 nm
  • Physical Vapor Deposition of Materials and Dielectrics
  • Plasma Chemical Vapor Deposition
  • Reactive Ion Etching
  • Inductively Couples Plasma-based Etching
  • High-Temperature Annealing
  • Wafer Bonding
  • Wet Chemical Processing
  • Characterization

Class 100 and 1000 Clean Rooms Benefiting from strong internal programs in optoelectronics, high-speed electronic devices, and nanostructures, Nanotech builds upon that infrastructure and expertise to provide researchers with state-of-the-art processes and fabrication techniques in these areas as well as the full spectrum of techniques required for semiconductor device fabrication. The total area of our fully operational environment is roughly 12,700 square feet with both class 100 and 1000 areas.

Convenient and Easy Access, and BillingYou can use the facility day or night, whether it's a holiday or not. If you have a pressing deadline to make, you can access the facility 24 hours/day, 365 days/year (except on leap year—you get an extra day!).

When you arrive, you can feel like James Bond for an instant, while the lady's voice on the optical camera allows you access to the facility. The optical camera compares your iris to the one on file and opens the door. No more keeping track of room keys or key cards!

Our system allows accurate tracking and billing for hours used. Industries and academic institutions can be easily billed through a simple recharge system.

Additional Resources Available at UCSB Facility users will benefit from the strong internal program in materials research and characterization at UCSB, through the user-accessible Materials Research Labs (MRL).

Materials Characterization capabilities include:

  • Atomic Force Microscopy
  • Scanning Electron Microscopy
  • Transmission Electron Microscopy
  • Photoluminescence Spectroscopy
  • X-ray Diffraction
  • Scanning Auger Microscopy
  • XPS
  • SIMS

National Nanotechnology Infrastructure Network (NNIN)The UCSB Nanofabrication facility is part of the National Nanotechnology Infrastructure Network (NNIN). The NNIN is a partnership of 13 universities that is dedicated to providing high-precision processing equipment in sophisticated facilities, that is supported by expert personnel and the latest in computer design aids. The combination of facilities, equipment, and expertise provided by the members of the network is unsurpassed in any single research laboratory. By promoting matches between enabling fabrication technology with research goals across a broad range of disciplines, the network hopes to open possiblities for new research breakthroughs. If we can't help you, we will try to find someone who can!

©2006 Board of Regents of the University of California