| Facility Pictures | |
Gowning Room |
Main Corridor / Storage racks |
Bay 2: RIE Etching |
Bay 3: Physical Deposition |
Bay 5: Thermal Process/Wet Etch |
Bay 6: Lithography1 |
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Facility Map
(for a high-resolution pdf, click here)
For specific equipment descriptions, see the Equipment page.
