Vacuum Deposition

• E-beam #1: Sharon Vacuum 4-pocket Electron Beam Evaporator (metals)
  
• E-Beam #2 Electron-Beam Evaporation System
  
• E-Beam #3 Load Locked Metal Evaporator Dual Gun (8 sources)
  
• E-Beam #4 CHA Muti-Wafer Metal Evaporator
  
• PECVD Plasma Therm 790 for Oxides and Nitrides
  
• Unaxis High Density PECVD
  
• Sputtered Films DC/AC bipolar 3-chamber Reactive Sputtering System
• 3-source Solder Evaporator, Veeco VE-300
  
• 3-source research S-gun DC/Pulsed DC Reactive Sputtering System
  
• NRC 3117 3-source Thermal Evaporator
• Veeco Nexus Ion Beam Deposition Tool

Test and Inspection

• FEI Sirion Ultra High Resolution Field-Emission SEM w/EDX
  
• Veeco Dimension 3100 Nanoman AFM
  
• Hitachi s2400 Scanning Electron Microscope
  
• Veeco Multimode Scanning Probe Microscope
  
• Various Optical Inspection Microscopes (5)
  
• Rudolph Auto-EL Ellipsometer
  
• Filmetrics White Light Reflection Dielectric Characterization tool
• Nanometrics 210 Reflectometer
  
• Dektak IIA Profilometer
  
• Probe Station with Curve Tracer
• Tencor Flexus 2320 Film Stress Measurement System
• Dektak VI Profilometer

Wet Benches and Fume Hoods

• Solvent Benches (4)
  
• Acid Wet Benches (5)
  
• Spin Wet Benches (3)
  
• Develop Wet Benches (3)