Use Our Facility

Need a research tool, but would rather not buy it? You can rent it in a new nanofabrication facility with 12,700 ft² of clean room space to work in!

Affordable rates provide you with the tools you need, as well as training and support from our dedicated and knowledgeable staff, that is tailored to your specific research needs.

We support a broad line of lithography, thin-film deposition, reactive ion etching, and characterization tools in support of device fabrication for a variety of materials, including InP, GaAs, GaN, SiC, Si, and other novel materials.

Staff support is available for training, tool fixturing, process consultation, and hands-on work.

Over 40% of our more than 500 per annum user community are from outside academic institutions and industry, doing significant research in our facility.

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Responsible Conduct Research Seminar Series:

Research Ethics

Engin Kirda

Sy and Laurie Sternberg Associate Professor

Northeastern University, Boston, MA


Thursday, February 2, 4-6pm, ESB 1001

Click here for more information!
 

We thank these companies for their contributions:

 
CDE logo
Panasonic logo

Sputtered Films,
now part of
tegal logo

 

 

NNIN Symposium: February 6-7, 2012 Register Now

Registration has been reopened.

Only 15 spots available.

Guided by critical system and circuit requirements, this symposium will define candidate devices, associated materials, and process technologies for future generations of electron devices. This workshop will address the problems and difficulties when working with:

  • future digital systems (VLSI) as these migrate to few-nm device dimensions
  • wireless communications systems as these migrate towards THz frequences

Each session will end with a brief discussion identifying primary obstacles. Each day will end with an interactive discussion on the best approaches to address these obstacles. Click here to read more!
 

Nanofabrication Facility
Lithography
Dry Etching
Deposition
Annealing
Wet Processing
Processing Recipes
Document Download
Document Search

Technical and educational staff services are possible through the generosity of the National Science Foundation through support via the NNIN.